TiW AND Al CONTACTS TO SHALLOW p+ JUNCTIONS - A COMPARISON BETWEEN FURNACE AND RAPID THERMAL ANNEALING (RTA) P. WIKLUND, U. WENNSTRÖM, H. NORSTRÖM, I. SUNI et A. LINDBERGJ. Phys. Colloques, 49 C4 (1988) C4-489-C4-494DOI: https://doi.org/10.1051/jphyscol:19884101
