CHARACTERISATION OF NARROW-SPACED ISOLATION IN A TWIN RETROGRADE WELL SUBMICRON CMOS PROCESS P. A. van der PLAS, P. H.J. SPIJKERS et F. M. KLAASSENJ. Phys. Colloques, 49 C4 (1988) C4-29-C4-32DOI: https://doi.org/10.1051/jphyscol:1988404
