RECENT PROGRESS IN HIGH AVERAGE POWER EXCIMER LASERS B. L. FONTAINE, B. M. FORESTIER, M. SENTIS, P. DELAPORTE et L. ARIFJ. Phys. Colloques, 48 C7 (1987) C7-331-C7-338DOI: https://doi.org/10.1051/jphyscol:1987780