MICROSTRUCTURE OF Si3N4 FILMS DEPOSITED ON VARIOUS SUBSTRATES BY CVD F. ANXIONNAZ, M. PARLIER, A. RIVIERE et M. LANCINJ. Phys. Colloques, 47 C1 (1986) C1-303-C1-308DOI: https://doi.org/10.1051/jphyscol:1986144
