THE EVALUATION OF β-Si3N4 MICROSTRUCTURES USING PLASMA-ETCHING AS A PREPARATIVE TECHNIQUE C. O'MEARA, P. NILSSON et G. L. DUNLOPJ. Phys. Colloques, 47 C1 (1986) C1-297-C1-301DOI: https://doi.org/10.1051/jphyscol:1986143
