A MONTE CARLO SIMULATION APPROACH TO THIN FILM ELECTRON MICROPROBE ANALYSIS BASED ON THE USE OF MOTT SCATTERING CROSS-SECTIONS K. Murata, S. Cvikevich et J. D. KuptsisJ. Phys. Colloques, 45 C2 (1984) C2-13-C2-16DOI: https://doi.org/10.1051/jphyscol:1984203