HIGHLY CONTROLLED DIFFUSION OF ION IMPLANTED ARSENIC BY MULTIPLE SCAN ELECTRON BEAM HEATING D. J. Godfrey, R. A. McMahon, H. Ahmed et M. DowsettJ. Phys. Colloques, 44 C5 (1983) C5-229-C5-233DOI: https://doi.org/10.1051/jphyscol:1983536
