INTERACTIONS OF Si (III) SURFACE WITH H2, NH3, SiH4 MULTIPOLAR PLASMAS STUDIED BY IN SITU ELLIPSOMETRY Y. Demay, P. Maurel et S. GourrierJ. Phys. Colloques, 44 C10 (1983) C10-253-C10-256DOI: https://doi.org/10.1051/jphyscol:19831053
