CHARACTERIZATION OF DIELECTRIC FILMS ON SEMICONDUCTOR SUBSTRATES BY LEAKY-MODES MEASUREMENT J.-P. Gruson, P.-J. Goirand, F. Cochet et O. ParriauxJ. Phys. Colloques, 44 C10 (1983) C10-131-C10-134DOI: https://doi.org/10.1051/jphyscol:19831028
