SELECTIVE ETCHING OF n-TYPE GaAs IN A CrO3-HF-H2O SYSTEM UNDER LASER ILLUMINATION J. L. Weyher et J. Van de VenJ. Phys. Colloques, 43 C5 (1982) C5-313-C5-319DOI: https://doi.org/10.1051/jphyscol:1982536
