SILICON MODULATION DOPING STRUCTURES USING MULTI-STEP MOLECULAR BEAM EPITAXY AND ION IMPLANTATION T. de Jong, W. A.S. Douma et F. W. SarisJ. Phys. Colloques, 43 C5 (1982) C5-173DOI: https://doi.org/10.1051/jphyscol:1982520
