TEM AND RBS STUDIES OF THE REGROWTH OF ARSENIC IMPLANTED POLYSILICON DUE TO AN OXIDATION DRIVE-IN M. C. Wilson, P. Ashburn, B. Soerwirdjo, G. R. Booker et P. WardJ. Phys. Colloques, 43 C1 (1982) C1-253-C1-258DOI: https://doi.org/10.1051/jphyscol:1982135
