EFFECTS OF ARGON ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON Peng Shao-qi, Yu Bing Qai, Zhang Pei Xian et Ye Xian JingJ. Phys. Colloques, 42 C4 (1981) C4-791-C4-794DOI: https://doi.org/10.1051/jphyscol:19814173
