GLOW-DISCHARGE a-Si : F PREPARED FROM SiF2 GAS R. Weil, M. Janai, B. Pratt, K. Levin et F. MoserJ. Phys. Colloques, 42 C4 (1981) C4-643-C4-646DOI: https://doi.org/10.1051/jphyscol:19814141
