LASER IMPLANTATION OF Fe IN SILICON Yu. V. Petrikin, S. Damgaard, M. Oron, J. W. Petersen et G. WeyerJ. Phys. Colloques, 41 C1 (1980) C1-423-C1-424DOI: https://doi.org/10.1051/jphyscol:19801164
