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Cited article:

UV LIGHT-INDUCED DEPOSITION OF COPPER FILMS

H. ESROM, G. WAHL, U. KOGELSCHATZ

J. Phys. Colloques, 50 C5 (1989) C5-719-C5-725

DOI: https://doi.org/10.1051/jphyscol:1989585

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Silent-discharge driven excimer UV sources and their applications

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