J. Phys. Colloques 42 (1981) C4-277-C4-280
Si-H VIBRATIONAL PROPERTIES IN CRYSTALLIZED HYDROGENATED SILICON FABRICATED BY REACTIVE SPUTTERING IN H2 ATMOSPHEREA. Hiraki, T. Imura, K. Mogi and M. Tashiro
Dept. of E.E., Osaka Univ., Suita, Osaka 565, Japan
Crystallized hydrogenated silicon (c-Si:H) films are fabricated by rf-sputtering in pure H2 atmosphere. Their sharp and fine structured infrared spectra have enabled us to assign accurately the vibrational configurations between Si and H. The results are applicable to the amorphous hydrogenated silicon (a-Si : H) where the Si-H vibrational configurations are not yet well understood.