34th International Field Emission Symposium / 34ème Symposium International d'Emission de Champ
J. Phys. Colloques 48 (1987) C6-183-C6-188
DOI: 10.1051/jphyscol:1987630
ION CURRENT CHARACTERISTICS OF Ar FIELD IONIZATION SOURCE
M. SATOElectrotechnical Laboratory 1-1-4, Umezono Sakuramura, Ibaraki, Japan
Abstract
Ion current characteristics of Ar field ion source has been studied using tungsten emitter cooled by liquid nitrogen. A decrease of ion current with increasing pressure is observed.The large part of the decrease is recovered with decreasing pressure, but the other small part of it is irreversible. It is shown that the reason of the decrease of ion current is due to the energy tansfer of impinging source gases without ionization.