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32 nd International Field Emission Symposium / 32ème Symposium International d'Emission de Champ

J. Phys. Colloques 47 (1986) C2-79-C2-83

DOI: 10.1051/jphyscol:1986212

DEVELOPMENT OF A HIGH DENSITY FINITE SET OF UNIFORM FIELD EMITTERS ON A THIN FILM GLASS SUBSTRATE

G.A. KITZMANN

Department of Physics, State University of New York, New Paltz, NY 12561, U.S.A.


Abstract
Copper, chrome tipped, field emitters have been made by directly depositing metals through a pair of magnetically held masks onto a thin film base of chrome/copper/chrome on a glass substrate. The emitter density is 1.0E6 emitters per square centimeter where the emitter base diameter is typically on the order of 1.5 microns and the emitters are on 10 micron centers. The individual emitters are typically 2 to 3 microns high with a radius of curvature of less than 0.2 microns.