J. Phys. Colloques 40 (1979) C7-193-C7-194
A NONLINEAR KINETIC THEORY FOR HF PLASMA GENERATION AND ELECTRON HEATING.G. Cicconi1, V. Molinari2 et L . Pollachini3
1 Electrical Engineering Dept. University of Genoa, Italy
2 Nuclear Engineering Lab., University of Bologna, Italy.
3 C.I.S.E., Milan Italy.
Nowdays a consistent progress has been obtained in describing, by means of kinetic models, the electron kinetics of many gas discharges and plasma generation ailso in nonsteady state and inhomogeneous to understand the microphysics of the phenomena involved in these plasmas /1/ /2/. Particularly a nonlinear asymptotic analysis of the positive column /4/ and the more extensive theoretical investigations on plasma column at high degree of ionization and under free fall and ambipolar diffusion regimes /5/, have been considered. The replacement of the positive column of a glow discharge, by means of a plasma column produced by a HF field, was recently also proved /3/. The theory presented in this paper may be considered in this context as a first approach for a more detailed description of plasma generation and electron heating in HF discharges.